2005 journal article

Design of an RF-heated bulk AlN growth reactor: Induction heating and heat transfer modeling

CRYSTAL GROWTH & DESIGN, 5(4), 1491–1498.

By: B. Wu  n, V. Noveski n, H. Zhang  n, R. Schlesser n, S. Mahajan n, S. Beaudoin n, Z. Sitar n

co-author countries: United States of America πŸ‡ΊπŸ‡Έ
Source: Web Of Science
Added: August 6, 2018

An induction heating and thermal model was developed to design an inductively heated reaction system for bulk AlN crystal growth by powder sublimation. The electromagnetic field and induction heat generation were calculated using the Maxwell equations, and transient temperature distribution was simulated considering conduction and radiation between various components. The complex dependence of the temperature distribution on the radio frequency (RF) coil current and position was demonstrated by numerical studies. A custom-designed high-temperature reactor was constructed and tested. To provide proper temperature control during envisioned sublimation growth, the response of temperature and temperature difference of the bottom and top external surfaces of the growth crucible to power consumption and coil position was measured. The experimental results corresponded well with the simulated temperature responses.