Title page for ETD etd-08132002-120836

Type of Document

Master's Thesis

Author

Bhate, Kaustubh Ramesh,

URN

etd-08132002-120836

Title

Design and Fabrication of a MEMS Pressure Sensor and Developing a Release Protocol for MEMS. by Kaustubh Ramesh Bhate A thesis submitted to the Graduate Faculty of North Carolina State University in partial fulfillment of the requirements for the degree in Master of Science in Electrical Engineering. Department of Electrical and Computer Engineering Raleigh 2002 Approved by: Dr Paul D. Franzon Chairman, Advisory Committee Dr Christine S. Grant Co-chair, Advisory Committee Dr Griff Bilbro

Degree

Master of Science

Graduate Program

Electrical Engineering

Advisory Committee

Advisor Name	Title
Dr. Paul D. Franzon	Committee Chair
Dr. Christine S. Grant	Committee Co-Chair
Dr. Griff Bilbro	Committee Member

Keywords

mems
release
pressure sensor
stiction

Date of Defense

2002-08-07

Availability

unrestricted

Abstract

ABSTRACT

Bhate Kaustubh, Ramesh. Design and Fabrication of a MEMS Pressure Sensor and Developing a Release Protocol for MEMS (Under the guidance of Dr. Paul Franzon and Dr. Christine Grant)

This presents the design and fabrication of a MEMS Pressure Sensor for application in the Textile Industry. The transducer element in the sensor is a piezoresistive device. The Pressure Sensor layout is made in Cadence-Virtuoso and a 3-D Model is simulated in MEMCAD. Calculated and simulated results are compared. Processing steps are carried out in the NCSU Cleanroom to fabricate the device. A part of this thesis also attempts to develop a Release Protocol for MEMS devices made in the SUMMIT process. SUMMIT chips are released by wet etching in HF followed by rinsing in Methanol. The released device is then observed under Optical Microscope for results. Cantilever beams are also designed in SUMMIT process to be tested electrically when they come back after being fabricated at Sandia National Laboratories.

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