Bonding constraints and defect formation at interfaces between crystalline silicon and advanced single layer and composite gate dielectrics

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1999

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Lucovsky, G., Wu, Y., Niimi, H., Misra, V., & Phillips, J. C. (1999). Bonding constraints and defect formation at interfaces between crystalline silicon and advanced single layer and composite gate dielectrics. Applied physics letters, 74(14), 2005-2007.

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