Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon

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2004

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Edge, L. F., Schlom, D. G., Brewer, R. T., Chabal, Y. J., Williams, J. R., Chambers, S. A., Hinkle, C., Lucovsky, G., Yang, Y., Stemmer, S., Copel, M., Hollander, B., & Schubert, J. (2004). Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon. Applied physics letters, 84(23), 4629-4631.

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