Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects
No Thumbnail Available
Date
2007
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Basceri, C., Sandhu, G. S., & Manning, H. M. (2007). Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects. U.S. Patent No. 7,241,705. Washington, DC: U.S. Patent and Trademark Office.